王北川,吴明晶,张国飞,李佳,魏铁峰,陈利

• 1:株洲钻石切削刀具股份有限公司
• 2:苏州六九新材料科技有限公司
• 3:中南大学粉末冶金国家重点实验室

摘要(Abstract)：

为详细研究W元素掺杂对TiAlN涂层的微结构及性能的影响，采用Ti_(40)Al_(60)、Ti_(38)Al_(60)W_2和Ti_(36)Al_(60)W_4三种靶材制备了Ti_(0.43)Al_(0.57)N、Ti_(0.42)Al_(0.54)W_(0.04)N和Ti_(0.40)Al_(0.53)W_(0.07)N三种涂层，并使用能量色散X射线光谱仪（EDX）、X射线衍射仪（XRD）、扫描电镜（SEM）、纳米压痕研究W元素掺杂对TiAlN涂层的成分、微观结构、力学性能、热稳定性和抗氧化性的影响。结果表明：三种涂层均呈面心立方结构；W的掺杂对涂层的硬度无明显影响，Ti_(0.43)Al_(0.57)N、Ti_(0.42)Al_(0.54)W_(0.04)N和Ti_(0.40)Al_(0.53)W_(0.07)N涂层的硬度分别为29.1GPa、29.6GPa和30.1GPa;W的加入提高了涂层的热稳定性，退火过程中涂层完全分解温度由Ti_(0.43)Al_(0.57)N的1200℃上升到Ti_(0.40)Al_(0.53)W_(0.07)N的1450℃；此外，在850℃氧化10h后，Ti_(0.43)Al_(0.57)N涂层已完全氧化，而Ti_(0.42)Al_(0.54)W_(0.04)N和Ti_(0.40)Al_(0.53)W_(0.07)N氧化层厚度分别为～0.59μm和～0.53μm。

关键词(KeyWords)： TiAlN涂层;TiAlWN涂层;硬度;热稳定性;抗氧化性;PVD

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金（51775560）

作者(Author): 王北川,吴明晶,张国飞,李佳,魏铁峰,陈利

参考文献(References)：

• [1] IKEDA T,SATOH H.Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method[J].Thin Solid Films,1991,195(1/2):99–110.
• [2] KIMURA A,HASEGAWA H,YAMADA K,et al. Effects of Al content on hardness,lattice parameter and microstructure of Ti1-x Alx N films[J].Surface&Coatings Technology,1999,120/121:438–441.
• [3]王北川，陈利.Al含量对Ti Al N涂层结构及性能的影响[J].表面技术，2022,51(2):29–38.WANG Beichuan, CHEN Li.Effect of Al content on microstructure and properties of TiAlN coatings[J].Surface Technology,2022,51(2):29–38.
• [4] PEI F,LIU H J,CHEN L,et al. Improved properties of TiAlN coating by combined Si-addition and multilayer architecture[J].Journal of Alloys and Compounds,2019,790:909–916.
• [5] SCHRAMM I C,JOHANSSON J?ESAAR M P,JENSEN J,et al. Impact of nitrogen vacancies on the high temperature behavior of(Ti1-xAlx)Ny alloys[J].Acta Materialia,2016,119:218–228.
• [6]张雨萌，朱丽慧，倪旺阳，等. Al含量对TiAlN涂层热稳定性能的影响[J].中南大学学报：自然科学版，2013,44(7):2696–2701.ZHANG Yumeng,ZHU Lihui,NI Wangyang,et al. Effect of Al content on thermal stability of TiAlN coatings[J].Journal of Central South University(Science and Technology),2013,44(7):2696–2701.
• [7] HOLLERWEGER R,RIEDL H,ARNDT M,et al. Guidelines for increasing the oxidation resistance of Ti-Al-N based coatings[J].Thin Solid Films,2019,688:137290.
• [8] GASSNER G,MAYRHOFER P H,KUTSCHEJ K,et al.Magnéli phase formation of PVD Mo-N and W-N coatings[J].Surface and Coatings Technology,2006,201(6):3335–3341.
• [9] LI X,BAKHIT B,JOHANSSON J M P,et al. Dense,single-phase,hard,and stress-free Ti(0.32)Al(0.63)W(0.05)N films grown by magnetron sputtering with dramatically reduced energy consumption[J]. Scientific Reports,2022,12:2166.
• [10] GLATZ S A,BOLVARDI H,KOLOZSVáRI S,et al. Arc evaporated W-alloyed Ti-Al-N coatings for improved thermal stability,mechanical,and tribological properties[J].Surface and Coatings Technology,2017,332:275–282.
• [11] PSHYK A V,PETROV I,BAKHIT B,et al.Energy-efficient physical vapor deposition of dense and hard Ti-Al-W-N coatings deposited under industrial conditions[J].Materials&Design,2023,227:111753.
• [12] WU Z T,TENGSTRAND O,BAKHIT B,et al.Growth of dense,hard yet low-stress Ti0.40Al0.27W0.33N nanocomposite films with rotating substrate and no external substrate heating[J].Journal of Vacuum Science&Technology A:Vacuum,Surfaces,and Films,2020,38(2).DOI:10.1116/1.5140357.
• [13] SANGIOVANNI D G,CHIRITA V,HULTMAN L. Toughness enhancement in TiAlN-based quarternary alloys[J].Thin Solid Films,2012,520(11):4080–4088.
• [14] REESWINKEL T,SANGIOVANNI D G,CHIRITA V,et al.Structure and mechanical properties of TiAlN-WNx thin films[J].Surface and Coatings Technology, 2011,205(20):4821–4827.
• [15] MORENO M,ANDERSSON J M,JOHANSSON-J M P,et al.Wear of Mo-and W-alloyed TiAlN coatings during high-speed turning of stainless steel[J].Surface and Coatings Technology,2022,446:128786.
• [16]彭滨. Cr、Ta和W元素添加对Ti AlN硬质涂层结构和性能的影响[D].广州：广东工业大学，2021.PENG Bin. Influence of the addition of Cr,Ta,and W on the structure and properties of TiAlN hard coatings[D].Guangzhou:Guangdong University of Technology,2021.
• [17] KIMBLIN C W.Erosion and ionization in the cathode spot regions of vacuum arcs[J].Journal of Applied Physics,1973,44(7):3074–3081.
• [18] DAVIS W D,MILLER H C. Analysis of the electrode products emitted by dc arcs in a vacuum ambient[J]. Journal of Applied Physics,1969,40(5):2212–2221.
• [19]唐伟忠.薄膜材料制备原理、技术及应用[M].北京：冶金工业出版社，2003:180.
• [20]王启民，张小波，张世宏，等.高功率脉冲磁控溅射技术沉积硬质涂层研究进展[J].广东工业大学学报，2013,30(4):1–13,133.WANG Qimin,ZHANG Xiaobo,ZHANG Shihong,et al.Progress of high power impulse magnetron sputtering for deposition of hard coatings[J]. Journal of Guangdong University of Technology,2013,30(4):1–13,133.
• [21] PILLING N,BEDWORTH R. The oxidation of metals at high temperatures[J]. The Journal of the Institute of Metals,1923,29:529.
• [22] HANAOR D,SORRELL C. Review of the anatase to rutile phase transformation[J]. Journal of Materials Science,2011,46(4):855–874.
• [23] MUSCAT J,SWAMY V,HARRISON N M. First-principles calculations of the phase stability of TiO2[J].Physical Review B,2002,65(22):224112.
• [24]杨燕.基于共格界面的Al1-x-yTiy Tax N/Ti AlN多层涂层的力学及热性能研究[D].长沙：中南大学，2017.YANG Yan.Research on mechanical and thermal properties of Al1-x-y Tiy Tax N/TiAlN multilayer coatings based on coherent interfaces[D]. Changsha:Central South University,2017.
• [25] VAZ F,REBOUTA L,ANDRITSCHKY M.Thermal oxidation of Ti1-x Alx N coatings in air[J]. Journal of the European Ceramic Society,1997,17(15/16):1971–1977.
• [26] CHEN L,Ya NG Y,WU M J,et al. Correlation between arc evaporation of Ti-Al-N coatings and corresponding Ti0.50Al0.50target types[J]. Surface and Coatings Technology,2015,275:309–315.